Parameter Preserving Model Reduction for MEMS System-level Simulation and Design

Abstract. Model reduction is a very helpful tool to generate compact models for system-level simulation. Quite often however, system matrices depend on design parameters and the new goal is not only to reduce the original system but also to preserve system parameters in the symbolic form during model reduction. We introduce multivariate moment matching as a possible solution to this problem. We consider several examples from MEMS to demonstrate the feasibility of the approach: a device cooled by airflow, a microhotplate, a flow meter (anemometer) and a microelectrode. Finally, we discuss problems that should be overcome in order to use this technique in software for engineering design applications.